1.

Conference Proceedings
Conference Proceedings
1. Release etch modeling analysis and the use of laser scanning microscopy for etch time prediction of micromachined structures
Matamis,G. ; Gogoi,B.P. ; Monk,D.J. ; McNeil,A. ; Burrows,V.A.
Pub. info.: Micromachining and microfabrication process technology VI : 18-20 September 2000, Santa Clara, USA.  pp.267-278,  2000.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4174
2.

Conference Proceedings
Conference Proceedings
2. Analytical techniques for examining reliability and failure mechanisms of barrier-coated encapsulated silicon pressure sensors exposed to harsh media
Bitko,G. ; Monk,D.J. ; Maudie,T. ; Stanerson,D. ; Wertz,J. ; Matkin,J. ; Petrovic,S.
Pub. info.: Micromachined devices and components II : 14-15 October 1996, Austin, Texas.  pp.248-258,  1996.  Bellingham, WA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2882
3.

Conference Proceedings
Conference Proceedings
3. Integration issues for pressure sensors
Gogoi,B.P. ; Monk,D.J. ; Maudie,T. ; Miller,T.F. ; Torres,J.
Pub. info.: Micromachining and microfabrication process technology V : 20-22 September, 1999, Santa Clara, California.  pp.174-187,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3874