1.

Conference Proceedings
Conference Proceedings
1. Diagnostics of Metalorganic Chemical Vapor Deposition of (Ba, Sr)TiO3 Films by Microdischarge Optical Emission Spectroscopy
Momose, S. ; Nakamura, T. ; Tachibana, K.
Pub. info.: CVD XV, proceedings of the fifteenth International Symposium on Chemical Vapor Deposition.  pp.740-747,  2000.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2000-13
2.

Conference Proceedings
Conference Proceedings
2. Infrared Spectroscopic Study on Metalorganic Chemical Vapor Deposition of (Ba, Sr)TiO3 Films
Nakamura, T. ; Nishimura, T. ; Momose, S. ; Tachibana, K.
Pub. info.: Chemical vapor deposition XVI and EUROCVD 14 : proceedings of the international symposium.  pp.814-820,  2003.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2003-8
3.

Conference Proceedings
Conference Proceedings
3. Defect quality management of 248nm alt- PSM in low-k1 condition [5853-87]
Nagamura, Y. ; Momose, S. ; Imai, A. ; Hosono, K. ; Morikawa, Y. ; Kojima, K. ; Mohri, H. ; Dai Nippon Printing Co., Ltd. (Japan)
Pub. info.: Photomask and Next-Generation Lithography Mask Technology XII.  pp.977-987,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5853