Smart structures and materials 1998 : smart electronics and MEMS : 2-4 March 1998, San Diego, California. pp.166-173, 1998. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Materials and Device Characterization in Micromachining II. pp.174-183, 1999. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering