1.

Conference Proceedings
Conference Proceedings
1. STRESS COMPENSATION TECHNIQUES IN THIN LAYERS APPLIED TO SILICON MICROMACHINING
Lang, W. ; Muck, G. ; Rose, E. ; Bausells, J. ; Kuhl, K. ; Moldovan, N. ; Suski, J.
Pub. info.: Amorphous insulating thin films : symposium held December 1-4, 1992, Boston, Massachusetts, U.S.A..  pp.119-126,  1993.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 284
2.

Conference Proceedings
Conference Proceedings
2. Strength of Ultrananocrystalline Diamond Thin Films-Identification of Weibull Parameters
Peng, B. ; Espinosa, H. D. ; Moldovan, N. ; Xiao, X. ; Auciello, O. ; Carlisle, J. A. ; Gruen, D. M. ; Divan, R. S. ; Mancini, D. C. ; Gerbi, J. E. ; Birrell, J.
Pub. info.: Mechanical properties derived from nanostructuring materials : symposium held April 22-25, 2003, San Francisco, California, U.S.A..  pp.49-56,  2003.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 778
3.

Conference Proceedings
Conference Proceedings
3. An Atomic-Scale Derived Continuous Approach for the Anisotropic Etching
Moldovan, N. ; Nedelcu, S. ; Camon, H.
Pub. info.: Semiconductor process and device performance modeling : symposium held December 2-3, 1997, Boston, Massachusetts, U.S.A..  pp.213-,  1998.  Warrendale, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 490
4.

Conference Proceedings
Conference Proceedings
4. Two- and three-dimensional ultrananocrystalline diamond (UNCD) structures for a high resolution diamond-based MEMS technology
Auciello, O. ; Krauss, A. R. ; Gruen, D. M. ; Meyer, E. M. ; Busmann, H. G. ; Tucek, J. ; Sumant, A. ; Jayatissa, A. ; Moldovan, N. ; Mancini, D. C. ; Gardos, M. N.
Pub. info.: Materials science of microelectromechanical systems (MEMS) devices II : symposium held November 29-December 1, 1999, Boston, Massachusetts, U.S.A..  pp.73-,  2000.  Warrendale, Pa..  MRS-Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 605
5.

Conference Proceedings
Conference Proceedings
5. Mathematical Modelling of Roughness-Temperature Evolution
Nedelcu, S. ; Moldovan, N.
Pub. info.: Computational and mathematical models of microstructural evolution : symposium held April 13-17, 1998, San Francisco, California, U.S.A..  pp.163-,  1998.  Warrendale, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 529
6.

Conference Proceedings
Conference Proceedings
6. Mechanical Properties of Ultrananocrystalline Diamond Thin Films for MEMS Applications
Espinosa, H.D. ; Peng, B. ; Kim, K.-H. ; Prorok, B.C. ; Moldovan, N. ; Xiao, X.C. ; Gerbi, J.E. ; Birrell, J. ; Auciello, O. ; Carlisle, J.A. ; Gruen, D.M. ; Mancini, D.C.
Pub. info.: Nano- and microelectromechanical systems (NEMS and MEMS) and molecular machines : symposium held December 2-4, 2002, Boston, Massachusetts, U.S.A..  pp.213-218,  2003.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 741
7.

Conference Proceedings
Conference Proceedings
7. Fabrication of MEMS Components Based on Ultrananocrystalline Diamond Thin Films and Characterization of Mechanical Properties
Sumant, A.V. ; Auciello, O. ; Krauss, A.R. ; Gruen, D.M. ; Ersoy, D. ; Tucek, J. ; Jayatissa, A. ; Stach, E. ; Moldovan, N. ; Mancini, D. ; Busmann, H.G. ; Meyer, E.M.
Pub. info.: Materials science of microelectromechanical systems (MEMS) devices III : symposium held November 27-28, 2000, Boston, Massachusetts, U.S.A..  2001.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 657