UV scanning enabling advanced SOI defectivity monitoring
- Author(s):
Maleville, C. Moulin, C. Delprat, D. McMillan, W. Payne, J. Birdwell K. Moirin R. - Publication title:
- Silicon-on-insulator technology and devices XII : proceedings of the international symposium
- Title of ser.:
- Electrochemical Society Proceedings Series
- Ser. no.:
- 2005-03
- Pub. Year:
- 2005
- Page(from):
- 357
- Page(to):
- 362
- Pages:
- 6
- Pub. info.:
- Pennington, N.J.: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566774611 [1566774616]
- Language:
- English
- Call no.:
- E23400/200503
- Type:
- Conference Proceedings
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