Proceedings of the third Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films. pp.549-558, 1994. Pennington, NJ. Electrochemical Society
Li, J. ; Moinpour, M. ; Fardi, B. ; Lee, J. ; Thach, D. ; Lawrence, M. ; Dass, A. ; Moghadam, F.
Pub. info.:
Proceedings of the Symposium on Contamination Control and Defect Reduction in Semiconductor Manufacturing III. pp.31-39, 1994. Pennington, NJ. Electrochemical Society
Watt, V.H.C. ; Bower, R. ; Chan, W. ; Hong, L. ; Moinpour, M.
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Proceedings of the Third International Symposium on Semiconductor Wafer Bonding : physics and applications. pp.573-578, 1995. Pennington, NJ. Electrochemical Society
Watt, V.H.C. ; Nakatani, D. ; Moinpour, M. ; Hwang, D. ; Lu, W.
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Proceedings of the third Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films. pp.328-337, 1994. Pennington, NJ. Electrochemical Society
Defect engineering in semiconductor growth, processing and device technology : symposium held April 26-May 1, 1992, San Francisco, California, U.S.A.. pp.713-718, 1992. Pittsburgh, Pa.. Materials Research Society
Proceedings of the third Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films. pp.276-284, 1994. Pennington, NJ. Electrochemical Society
Maxim, M. ; Moinpour, M. ; Chu, J. ; Nguyen, H. ; Freiberger, P. ; Stenton, N.
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Rapid thermal and integrated processing III : symposium held April 4-7, 1994, San Francisco, California, U.S.A.. pp.289-, 1994. Pittsburgh, PA. MRS - Materials Research Society
Philipossian, A. ; Moinpour, M. ; Wilkinson, R. ; Watt, V. H. C.
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Ultraclean semiconductor processing technology and surface chemical cleaning and passivation : Symposum held April 17-19, 1995, San Francisco, California, USA. pp.75-, 1995. Pittsburgh, PA. MRS - Materials Research Society
Advanced metallization for future ULSI : symposium held April 8-11, 1996, San Francisco, California, U.S.A.. pp.243-, 1996. Pittsburgh, Pa.. MRS - Materials Research Society
Watt, V. H. C. ; Moinpour, M. ; Sadjadi, R. ; Lu, W. ; Neubauer, G. ; Bower, R.
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Evolution of thin film and surface structure and morphology : symposium held November 28-December 2, 1994, Boston, Massachusetts, USA. pp.377-, 1995. Pittsburgh, Pa.. MRS - Materials Research Society