1.

Conference Proceedings

Conference Proceedings
Theodoropoulos, C. ; Moffat, H. K. ; Mountziaris, T. J.
Pub. info.: Semiconductor process and device performance modeling : symposium held December 2-3, 1997, Boston, Massachusetts, U.S.A..  pp.155-,  1998.  Warrendale, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 490
2.

Conference Proceedings

Conference Proceedings
Pawlowski, R. P. ; Theodoropoulos, C. ; Mountziaris, T. J. ; Moffat, H. K. ; Han, J. ; Thrush, E. J.
Pub. info.: New methods, mechanisms and models of vapor deposition : symposium held April 24-26, 2000, San Francisco, California, U.S.A..  pp.159-,  2000.  Warrendale, PA.  MRS-Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 616