Theodoropoulos, C. ; Moffat, H. K. ; Mountziaris, T. J.
Pub. info.:
Semiconductor process and device performance modeling : symposium held December 2-3, 1997, Boston, Massachusetts, U.S.A.. pp.155-, 1998. Warrendale, Pa.. MRS - Materials Research Society
Pawlowski, R. P. ; Theodoropoulos, C. ; Mountziaris, T. J. ; Moffat, H. K. ; Han, J. ; Thrush, E. J.
Pub. info.:
New methods, mechanisms and models of vapor deposition : symposium held April 24-26, 2000, San Francisco, California, U.S.A.. pp.159-, 2000. Warrendale, PA. MRS-Materials Research Society