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16 results

Conference Proceedings

1. Application of polysilanes for deep-UV antireflective coating

Onishi, Y. ; Sato, Y. ; Shiobara, E. ; Miyoshi, S. ; Matsuyama, H. ; Abe, J. ; Ichinose, H. ; Ohiwa, T. ; Nakano, Y. ; Yoshikawa, S. ; Hayase, S.

Pub. info.:	Microlithography 1999 : advances in resist technology and processing XVI : 15-17 March 1999, Santa Clara, California. pp.205-213, 1999. Bellingham, Wash., USA. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3678

Conference Proceedings

2. Studies of Moisture Adsorption on Various Kinds of Solid Surfaces Using Anhydrous Hydrogen Fluoride

Izumi, H. ; Nakagawa, Y. ; Miyoshi, S. ; Ohmi, T.

Pub. info.:	Proceedings of the Seventh International Symposium on Oxide Films on Metals and Alloys. pp.246-255, 1994. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	1994-25

Conference Proceedings

3. Impurity cation diffusion in perovskite-type oxide, YCrO3

Hong, J.-O. ; Miyoshi, S. ; Kaimai, A. ; Yashiro, K. ; Nigara, Y. ; Kawada, T. ; Mizusaki, J.

Pub. info.:	Ionic and mixed conducting ceramics : proceedings of the fourth international symposium. pp.49-57, 2001. Pennington, N.J.. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	2001-28

Conference Proceedings

4. Effect of Nonstoichiometry on the Volume of LaMnO3?. Based Perovskite Oxides

Miyoshi, S. ; Hong, I. ; Yashiro, K. ; Kairnai, A. ; Nigara, Y. ; Kawada, T. ; Mizusaki, J. ; Kawamura, K.

Pub. info.:	Solid-state ionic devices III, proceedings of the international symposium. pp.372-382, 2002. Pennington, N.J.. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	2002-26

Technical Paper

5. Development of PGM Single Nano Catalyst Technology.

Iwakuni, H. ; Miyoshi, S. ; Takami, A.

Pub. info.:	2009 SAE world congress : technical paper. 2009. Warrendale, Penn.. Society of Automotive Engineers
Title of ser.:	Society of Automotive Engineers technical paper series
Ser. no.:	2009

Technical Paper

6. The Effect of New Shape Support Material for the Lean Nox Trap Catalyst on its Catalytic Characteristics.

Miyoshi, S. ; Harada, K. ; Iwakuni, H. ; Yamada, H. ; Tsushio, Y.

Pub. info.:	14th Asia Pacific Automotive Engineering Conference : SAE technical paper. 2007. Warrendale, Penn.. Society of Automotive Engineers
Title of ser.:	Society of Automotive Engineers technical paper series
Ser. no.:	2007

Technical Paper

7. Axial Pressure Profile Effects on Flute Interchange Stabillity in the Tandem Mirror GAMMA 10

Hojo, H. ; Watanabe, T. ; Inutake, M. ; Ichimura, M. ; Miyoshi, S.

Pub. info.:

NASA Technical Reports. pp.1-18, 1991. National Aeronautics and Space Adminstration

Conference Proceedings

8. 157-nm lithography with high numerical aperture lens for 70-nm technology node

Suganaga, T. ; Kanda, N. ; Kim, J.-H. ; Yamabe, O. ; Watanabe, K. ; Furukawa, T. ; Miyoshi, S. ; Itani, T. ; Cashmore, J.S. ; Gower, M.C.

Pub. info.:	Optical Microlithography XV. Part One pp.584-593, 2002. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4691

Conference Proceedings

9. 157-nm lithography for 65-nm node SRAM-gate

Suganaga, T. ; Irie, S. ; Miyoshi, S. ; Kim, J.-H. ; Watanabe, K. ; Kurose, E. ; Furukawa, T. ; Hagiwara, T. ; Ishimaru, T. ; Itani, T.

Pub. info.:	Optical Microlithography XVI. Part One pp.261-269, 2003. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5040

10.

Conference Proceedings

10. Defect analysis in 157-nm photolithography process

Hori, S. ; Miyahara, O. ; Kiba, Y. ; Ono, Y. ; Kitano, J. ; Miyoshi, S. ; Furukawa, T. ; Itani, T.

Pub. info.:	Metrology, Inspection, and Process Control for Microlithography XVI. Part Two pp.646-652, 2002. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4689

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Author: Miyoshi, S.