1.

Conference Proceedings
Conference Proceedings
1. Development and Investigation on ERAS-100 of 100 mm Diameter Wafer for 4H-SiC Post Ion Implantation Annealing
Shibagaki, M. ; Satoh, M ; Kurematsu, Y. ; Numajiri, K. ; Watanabe, F. ; Haga, S. ; Miura, K. ; Suzuki, T. ; Miyagawa, S.
Pub. info.: Silicon carbide and related materials - 2005 : proceedings of the International Conference on Silicon Carbide and Related Materials - 2005 : Pittsburgh, Pennsylvania, USA : September 18-23 2005.  pp.807-810,  2006.  Stafa-Zuerich.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 527-529
2.

Conference Proceedings
Conference Proceedings
2. Annealing Behavior of N+-Implantation-Induced Defects in SiC at Low Temperatures
Satoh, M. ; Suzuki, T. ; Miyagawa, S.
Pub. info.: Silicon carbide and related materials - 2005 : proceedings of the International Conference on Silicon Carbide and Related Materials - 2005 : Pittsburgh, Pennsylvania, USA : September 18-23 2005.  pp.791-794,  2006.  Stafa-Zuerich.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 527-529
3.

Conference Proceedings
Conference Proceedings
3. Deposition of Diamond-Like Carbon Films using Plasma Based Ion Implantation with Bipolar Pulses
Miyagawa, S. ; Miyagawa, Y.
Pub. info.: Ion beam synthesis and processing of advanced materials : symposium held November 27-29, 2000, Boston, Massachusetts, U.S.A..  2001.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 647