1.

Conference Proceedings
Conference Proceedings
1. Nanofabrication processes for single-ion implantation of sillicon quantum computer devices
McKinnon, P.P. ; Stanley, F.E. ; Buehler, T.M. ; Gauja, E. ; Peceros, K. ; Macks, L.D. ; Mitic, M. ; Chan, V. ; Dzurak, A.S. ; Clark, R.G. ; Yang, C.J. ; Jamieson, D.N. ; Prawer, S.D.
Pub. info.: BioMEMS and smart nanostructures : 17-19 December 2001, Adelaide, Australia.  pp.310-318,  2001.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4590
2.

Conference Proceedings
Conference Proceedings
2. Optimization of single keV ion implantation for the construction of single P-donor devices
Yang, C. ; Jamieson, D. N. ; Hopt, T. ; Andresen, S. E. ; Hearne, S. M. ; Hudson, F. E. ; Pakes, C. I. ; Mitic, M. ; Gauja, E. ; Tamanyan, G. ; Dzurak, A. S. ; Prawer, S. ; Clark, R. G.
Pub. info.: Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems II.  pp.64-71,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5650
3.

Conference Proceedings
Conference Proceedings
3. Nanofabrication of charge-based Si:P quantum computer devices using single-ion implantation
Mitic, M. ; Andresen, S. E. ; Chan, V. C. ; Buehler, T. M. ; Ferguson, A. J. ; Gaujo, E. ; Hudson, F. E. ; Reilly, D. J. ; Hamilton, A. R. ; Dzurak, A. S. ; Clark, R. G. ; Yang, C. ; Hopt, T. ; Pakes, C. I. ; Jamieson, D. N.
Pub. info.: Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems II.  pp.55-63,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5650