1.

Conference Proceedings
Conference Proceedings
1. Evaluation of Amorphous Diamond-Like Carbon and Boron Nitride Films as Low Permittivity Dielectrics
Sullivan, J. P. ; Friedmann, T. A. ; Apblett, C. A. ; Siegal, M. P. ; Missert, N. ; Lovejoy, M. L. ; Mirkarimi, P. B. ; McCarty, K. F.
Pub. info.: Low-dielectric constant materials : synthesis and applications in microelectronics : symposium held April 17-19, 1995, San Francisco, California, U.S.A..  pp.273-,  1995.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 381
2.

Conference Proceedings
Conference Proceedings
2. NUCLEATION AND GROWTH OF CUBIC BORON NITRIDE FILMS PRODUCED BY ION-ASSISTED PULSED LASER DEPOSITION
Friedmann, T. A. ; Medlin, D. L. ; Mirkarimi, P. B. ; McCarty, K. F. ; Klaus, E. J. ; Boehme, D. R. ; Johnsen, H. A. ; Mills, M. J. ; Ottesen, D. K. ; Barbour, J. C.
Pub. info.: Materials synthesis and processing using ion beams : symposium held November 29-December 3, 1993, Boston, Massachusetts, U.S.A..  pp.959-,  1994.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 316
3.

Conference Proceedings
Conference Proceedings
3. ELECTRON MICROSCOPY STUDY OF CUBIC BORON NITRIDE THIN FILMS GROWN BY ION-ASSISTED PULSED LASER DEPOSITION
Medlin, D. L. ; Friedmann, T. A. ; Mirkarimi, P. B. ; McCarty, K. F. ; Mills, M. J.
Pub. info.: Phase transformations in thin films : thermodynamics and kinetics : symposium held April 13-15, 1993, San Francisco, California, U.S.A..  pp.373-,  1993.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 311
4.

Conference Proceedings
Conference Proceedings
4. Overcoming substrate defect decoration effects in EUVL mask blank development
Kearney, P. A. ; Randive, R. V. ; Ma, A. ; Krick, D. ; Weaver, A. ; Reiss, I. ; Abraham, D. ; Mirkarimi, P. B. ; Spiller, E.
Pub. info.: 24th Annual BACUS Symposium on Photomask Technology.  pp.800-806,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5567