Optical microlithography XII : 17-19 March 1999, Santa Clara, California. Part1 pp.239-249, 1999. Bellingham, Wash., USA. SPIE - The International Society for Optical Engineering
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Optical microlithography XI : 25-27 February 1998, Santa Clara, California. pp.56-66, 1998. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
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Optical microlithography XIII : 1-3 March 2000, Santa Clara, USA. Part2 pp.896-904, 2000. Bellingham, Wash., USA. SPIE - The International Society for Optical Engineering
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Metrology, Inspection, and Process Control for Microlithography X. pp.169-172, 1996. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering