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10 results

Conference Proceedings

1. Attainment of Low Resistivity Polycide Films Using Rapid Thermal Annealing

Yoon, H.A. ; Chen, C. ; Singhal, A. ; Lapes, D. ; Miner, G. ; Hong, S. ; Yamazaki, M. ; Maeda, Y.

Pub. info.:	Advances in rapid thermal processing : proceedings of the symposium. pp.249-256, 1999. Pennington, N. J.. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	99-10

Conference Proceedings

2. 32 Development of 12 A plasma nitrided gate dielectrics through characterization of pfocess, physical and electrical parameters

Miner, G. ; Kraus, P. ; Chua, T-C. ; Holland, J. ; Olsen, C. ; Ahmed, K. ; Hegedus, A. ; Hung, S. ; Noon, F. ; Iierrera-Gomez, A. ; Lepert, A. ; Meissner, P.

Pub. info.:	Advanced short-time thermal processing for Si-based CMOS devices : proceedings of the international symposium. pp.251-264, 2003. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	2003-14

Conference Proceedings

3. Gate Dielectrics Formed by Remote Plasma Nitridaion of Ultrathin In-Situ Steam Generated (ISSG) Oxides

Watt, V.H.C. ; Torres, K. ; Jackson, M.D. ; Huff, H.R. ; Abmed, K. ; Jallepally, R. ; Noble, D. ; Toni, N. ; Miner, G.

Pub. info.:	Rapid thermal and other short-time processing technologies : proceedings of the international symposium. pp.231-238, 2000. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	2000-9

Conference Proceedings

4. A Novel Method for Selective Oxidation of W/WNx/Poly Gate Stack Using RTP ISSG Techniques

Joo, H.S. ; Ng, B. ; Lopes, D. ; Miner, G.

Pub. info.:	ULSI process integration : proceedings of the first international symposium. pp.203-212, 1999. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	99-18

Conference Proceedings

5. Enabling Single-Wafer Process Technologies for Reliable Ultra-Thin Gate Dielectrics

Miner, G. ; Xing, G. ; Joo, H.S. ; Sonchez, F. ; Yokoa, Y. ; Chen, C. ; Lopes, D. ; Balakrishna, A.

Pub. info.:	Advances in rapid thermal processing : proceedings of the symposium. pp.3-14, 1999. Pennington, N. J.. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	99-10

Conference Proceedings

6. Dilute Steam Rapid Thermal Oxidation for 30 A Gate Oxides

Reid, K.G. ; Tseng, H. ; Hegde, R. ; Miner, G. ; Xing, G.

Pub. info.:	Advances in rapid thermal processing : proceedings of the symposium. pp.23-30, 1999. Pennington, N. J.. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	99-10

Conference Proceedings

7. Photonic muscles: optically controlled active optics [5894-46]

Ritter, J. ; Brazik, J. ; Basame, S. ; Failbach, M. ; Bradford, L. ; Douglas, D. ; Miner, G.

Pub. info.:	Advanced wavefront control : methods, devices, and applications III : 31 July-2 August 2005, San Diego, California, USA. pp.589419-, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5894

Conference Proceedings

8. Nitrogen Profile Engineering in Thin Gate Oxides

Kuehne, J. ; Hattangady, S. ; Piccirillo, J. ; Xing, G. C. ; Miner, G. ; Lopes, D. ; Tauber, R.

Pub. info.:	Rapid thermal and integrated processing VII : symposium held April 13-15, 1998, San Francisco, California, U.S.A.. pp.181-, 1998. Pittsburgh, PA. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	525

Conference Proceedings

9. Remote Plasma Nitridation of In Situ Steam Generated (ISSG) Oxide

Al-Shareef, Husam N. ; Karamcheti, A. ; Luo, T.T. ; Brown, G.A. ; Watt, V.H.C. ; Jackson, M.D. ; Huff, H.R. ; Jallepally, R. ; Noble, D. ; Tam, N. ; Miner, G.

Pub. info.:	Gate stack and silicide issues in silicon processing : symposium held April 25-27, 2000, San Francisco, California, U.S.A.. pp.C7.15-, 2001. Warrendale, PA. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	611

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Conference Proceedings

10. Thermal Technologies for Sub-lOOnm CMOS Scaling: Development Strategies

Meissner, P. ; Hegedus, A. ; Madok, J. ; Thakur, R. ; Miner, G.

Pub. info.:	Rapid thermal and other short-time processing technologies III : proceedings of the international symposium. pp.37-46, 2002. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	2002-11

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Author: Miner, G.