1.

Conference Proceedings
Conference Proceedings
1. Loading effect parameters of dry etcher system and their analysis in mask-to-mask loading and within-mask loading
Kwon,H.-J. ; Min,D.-S. ; Jang,P.-J. ; Chang,B.-S. ; Choi,B.-Y. ; Jeong,S.-H.
Pub. info.: 21st Annual BACUS Symposium on Photomask Technology.  4562  pp.79-87,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4562
2.

Conference Proceedings
Conference Proceedings
2. Dry etching of Cr layer and its loading effect
Kwon,H.-J. ; Min,D.-S. ; Jang,P.-J. ; Chang,B.-S. ; Choi,B.-Y. ; Park,K.-H. ; Jeong,S.-H.
Pub. info.: Photomask and Next-Generation Lithography Mask Technology VIII.  pp.382-389,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4409
3.

Conference Proceedings
Conference Proceedings
3. Low-chirp cascaded multiple quantum well vertical light modulator
Min,D.-S. ; Langer,D.W.
Pub. info.: Optoelectronic Integrated Circuits II.  pp.181-188,  1997.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3290
4.

Conference Proceedings
Conference Proceedings
4. Waveguide beamsplitters integrated with an erbium-doped thin-film optical amplifier
Kim,H.K. ; Lee,B. ; Langer,D.W. ; Min,D.-S. ; Li,C.C.
Pub. info.: Optoelectronic Integrated Circuits II.  pp.268-277,  1997.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3290
5.

Conference Proceedings
Conference Proceedings
5. Design and analysis of wide-angle Y-branch waveguide with low losses for integrated optics
Min,D.-S. ; Langer,D.W. ; Pant,D.K. ; Coalson,R.D.
Pub. info.: Optoelectronic Integrated Circuits.  pp.459-467,  1997.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3006