1.

Conference Proceedings
Conference Proceedings
1. The improvement of DOF for sub-1OOnm process by focus scan [6154-56]
Kim, J. C. ; Yang, H. J. ; Jeon J.-H ; Park C.-H ; Moon, J ; Yim D ; Kim J. W ; Tseng S ; Rhe K.-K ; Min Y.-H ; Chen A C
Pub. info.: Optical Microlithography XIX.  pp.61541K-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6154
2.

Conference Proceedings
Conference Proceedings
2. How to obtain accurate resist simulations in very low-kl era- [6154-107]
Chiou T. B ; Park C. H ; Choi, J. S ; Min Y.-H ; Hansen S ; Tseng S. E ; Chen A C ; Yim D
Pub. info.: Optical Microlithography XIX.  pp.61542V-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6154