Mimura, H. ; Futagi, T. ; Matsumoto, T. ; Ohta, Y. ; Kitamura, K. ; Kanemitsu, Y.
Pub. info.:
Silicon-based optoelectronic materials : Symposium held April 12-14, 1993, San Francisco, California, U.S.A.. pp.385-390, 1993. Pittsburgh, PA. Materials Research Society
Kanemitsu, Y. ; Uto, H. ; Matsumoto, Y. ; Futagi, T. ; Mimura, H.
Pub. info.:
Silicon-based optoelectronic materials : Symposium held April 12-14, 1993, San Francisco, California, U.S.A.. pp.265-270, 1993. Pittsburgh, PA. Materials Research Society
Matsumoto, T. ; Tamaki, T. ; Futagi, T. ; Mimura, H. ; Kanemitsu, Y.
Pub. info.:
Silicon-based optoelectronic materials : Symposium held April 12-14, 1993, San Francisco, California, U.S.A.. pp.355-360, 1993. Pittsburgh, PA. Materials Research Society
Mori, Y. ; Yamauchi, K. ; Yamamura, K. ; Mimura, H. ; Sano, Y. ; Saito, A. ; Endo, K. ; Souvorov, A. ; Yabashi, M. ; Tamasaku, K. ; Ishikawa, T.
Pub. info.:
Advances in mirror technology for X-ray, EUV lithography, laser, and other applications : 7-8 August 2003, San Diego, California, USA. pp.105-111, 2004. Bellingham, Wash., USA. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Mori, Y. ; Yamauchi, K. ; Yamamura, K. ; Mimura, H. ; Sano, Y. ; Saito, A. ; Endo, K. ; Souvorov, A. ; Yabashi, M. ; Tamasaku, K. ; Ishikawa, T. ; Shimura, M. ; Ishizaka, Y.
Pub. info.:
Advances in mirror technology for X-ray, EUV lithography, laser, and other applications : 7-8 August 2003, San Diego, California, USA. pp.11-17, 2004. Bellingham, Wash., USA. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Matsuyama, S. ; Mimura, H. ; Yumoto, H. ; Hara, H. ; Yamamura, K. ; Sano, Y. ; Endo, K. ; Mori, Y. ; Nishino, Y. ; Tamasaku, K. ; Yabashi, M. ; Tshikawa, T. ; Yamauchi, K.
Pub. info.:
Laser-generated, synchrotron, and other laboratory X-ray and EUV sources, optics, and applications II : 2-4 August 2005, San Diego, California, USA. pp.591804-591804, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Kanemitsu, Y. ; Matsumoto, T. ; Futagi, T. ; Mimura, H.
Pub. info.:
Silicon-based optoelectronic materials : Symposium held April 12-14, 1993, San Francisco, California, U.S.A.. pp.205-210, 1993. Pittsburgh, PA. Materials Research Society