Smart structures and materials 2004 : smart electronics, MEMS, BioMEMS, and nanotechnology : 15-18 March 2004, San Diego, California, USA. pp.399-410, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Design, process integration, and characterization for microelectronics : 6-7 March 2002, Santa Clara, USA. pp.128-135, 2002. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Stirton, J.B. ; Miller, C.W. ; Viswanathan, A. ; Miyagi, M. ; Lane, L. ; Laughery, M.A. ; Parikh, T. ; Chan, K.C. ; Sezginer, A.
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Process and Materials Characterization and Diagnostics in IC Manufacturing. pp.155-160, 2003. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering