1.

Conference Proceedings

Conference Proceedings
Choi, J.-H. ; Mirsaidov, U.M. ; Miller, C.W. ; Lee, Y.J. ; Guchhait, S. ; Chabot, M.D. ; Lu, W. ; Markert, J.T.
Pub. info.: Smart structures and materials 2004 : smart electronics, MEMS, BioMEMS, and nanotechnology : 15-18 March 2004, San Diego, California, USA.  pp.399-410,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5389
2.

Conference Proceedings

Conference Proceedings
Jackson, T.L. ; Markle, R.J. ; Miller, C.W. ; Stewart, E.C. ; Crowell, R.A.
Pub. info.: Design, process integration, and characterization for microelectronics : 6-7 March 2002, Santa Clara, USA.  pp.128-135,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4692
3.

Conference Proceedings

Conference Proceedings
Stirton, J.B. ; Miller, C.W. ; Viswanathan, A. ; Miyagi, M. ; Lane, L. ; Laughery, M.A. ; Parikh, T. ; Chan, K.C. ; Sezginer, A.
Pub. info.: Process and Materials Characterization and Diagnostics in IC Manufacturing.  pp.155-160,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5041