1.

Conference Proceedings
Conference Proceedings
1. Adhesion of Polysilicon Microbeams in Controlled Humidity Ambients
Boer, M. P. de ; Clews, P. J. ; Smith, B. K. ; Michalske, T. A.
Pub. info.: Microelectromechanical structures for materials research : symposium held April 15-16, 1998 , San Francisco, California, U.S.A..  pp.131-,  1998.  Warrendale, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 518
2.

Conference Proceedings
Conference Proceedings
2. Origins of Viscoelastic Dissipation in Self-Assembled Organic Monolayers
Shinn, N. D. ; Michalske, T. A.
Pub. info.: Fundamentals of nanoindentation and nanotribology : symposium held April 13-17, 1998, San Francisco, California, U.S.A..  pp.169-,  1998.  Warrendale, Penn..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 522
3.

Conference Proceedings
Conference Proceedings
3. Near-Plastic Threshold Indentation and the Residual Stress in Thin Films
Houston, J. E. ; Michalske, T. A.
Pub. info.: Thin films, stresses and mechanical properties VI : symposium held April 8-12, 1996, San Francisco, California, U.S.A..  pp.3-,  1997.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 436
4.

Conference Proceedings
Conference Proceedings
4. Friction measurement in MEMS using a new test structure
Crozier, B. T. ; Boer, M. P. de ; Redmond, J. M. ; Bahr, D. F. ; Michalske, T. A.
Pub. info.: Materials science of microelectromechanical systems (MEMS) devices II : symposium held November 29-December 1, 1999, Boston, Massachusetts, U.S.A..  pp.129-,  2000.  Warrendale, Pa..  MRS-Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 605
5.

Conference Proceedings
Conference Proceedings
5. Electrochemical Microfabrication Utilizing Porous Silicon
Howard, A. J. ; Guilinger, T. R. ; Kelly, M. J. ; Stevenson, J. O. ; Joyce, S. A. ; Houston, J. E. ; Michalske, T. A.
Pub. info.: AIChE ANNUAL MEETING -LOS ANGELES, CA- NOVEMBER 17-22, 1991.  1991.  New York.  American Institute of Chemical Engineers
Title of ser.: AIChE meeting [papers]
Ser. no.: 1991
6.

Conference Proceedings
Conference Proceedings
6. Role of interfacial properties on MEMS performance and reliability (Invited Paper)
de Boer, M. P. ; Knapp, J. A. ; Mayer, T. M. ; Michalske, T. A.
Pub. info.: Microsystems Metrology and Inspection.  pp.2-15,  1999.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3825