1.

Conference Proceedings
Conference Proceedings
1. Development of advanced micromirror arrays by flip-chip assembly
Michalicek,M.A. ; Bright,V.M.
Pub. info.: MOEMS and Miniaturized systems II : 22-24 October 2001, San Francisco, USA.  pp.102-113,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4561
2.

Conference Proceedings
Conference Proceedings
2. Fabrication of five-level ultraplanar micromirror arrays by flip-chip assembly
Michalicek,M.A. ; Bright,V.M.
Pub. info.: MOEMS and Miniaturized systems II : 22-24 October 2001, San Francisco, USA.  pp.293-304,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4561
3.

Conference Proceedings
Conference Proceedings
3. Flip-chip fabrication of integrated micromirror arrays using a novel latching off-chip hinge mechanism
Michalicek,M.A. ; Bright,V.M.
Pub. info.: MOEMS and Miniaturized systems II : 22-24 October 2001, San Francisco, USA.  pp.209-220,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4561
4.

Conference Proceedings
Conference Proceedings
4. Development of advanced second-generation micromirror devices fabricated in a four-level planarized surface-micromachined polycrystalline silicon process
Michalicek,M.A. ; Comtois,J.H. ; Schriner,H.K.
Pub. info.: Spatial light modulators : 28-29 January 1998, San Jose, California.  pp.71-80,  1998.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3292
5.

Conference Proceedings
Conference Proceedings
5. Design and testing of polysilicon surface-micromachined piston micromirror arrays
Cowan,W.D. ; Bright,V.M. ; Lee,M.K. ; Comtois,J.H. ; Michalicek,M.A.
Pub. info.: Spatial light modulators : 28-29 January 1998, San Jose, California.  pp.60-70,  1998.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3292
6.

Conference Proceedings
Conference Proceedings
6. SAMPLE (Sandia agile MEMS prototyping,layout tools,and education)
Craig Barron,C. ; Davies,B.R. ; Sniegowski,J.J. ; Rodgers,M.S. ; Comtois,J.H. ; Michalicek,M.A.
Pub. info.: Micromachining and microfabrication process technology III : 29-30 September, 1997, Austin, Texas.  pp.10-16,  1997.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3223
7.

Conference Proceedings
Conference Proceedings
7. Design and fabrication of optical MEMS using a four-level planarized surface-micromachined polycrystalline silicon process
Michalicek,M.A. ; Comtois,J.H. ; Schriner,H.K.
Pub. info.: Miniaturized Systems with Micro-Optics and Micromechanics III.  pp.48-55,  1998.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3276
8.

Conference Proceedings
Conference Proceedings
8. Micromirror arrays fabricated by flip-chip assembly
Michalicek,M.A. ; Zhang,W. ; Harsh,K.F. ; Bright,V.M. ; Lee,Y.C.
Pub. info.: Miniaturized Systems with Micro-Optics and MEMS.  pp.68-79,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3878
9.

Conference Proceedings
Conference Proceedings
9. Implementation of hexagonal micromirror arrays as phase-mostly spatial light modulators
Comtois,J.H. ; Bright,V.M. ; Gustafson,S.C. ; Michalicek,M.A.
Pub. info.: Microelectronic Structures and Microelectromechanical Devices for Optical Processing and Multimedia Applications.  pp.76-87,  1995.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2641