Tada, H. ; Nieva, P. ; Zavracky, P. ; Miaoulis, I.N. ; Wong, P.Y.
Pub. info.:
Materials science of microelectromechanical systems (MEMS) devices : symposium held December 1-2, 1998, Boston, Massachusetts, U.S.A.. pp.39-44, 1999. Warrendale, Pa.. Materials Research Society