1.

Conference Proceedings
Conference Proceedings
1. Excimer laser cleaning for microelectronics:modeling,applications,and challenges
Meunier,M. ; Wu,X. ; Beaudoin,F. ; Sacher,E. ; Simard-Normandin,M.
Pub. info.: Laser applications in microelectronic and optoelectronic manufacturing IV : 25-27 January 1999, San Jose, California.  pp.290-301,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3618
2.

Conference Proceedings
Conference Proceedings
2. Production of photoluminescent Si-based nanostructures by laser ablation:effects of ablation and postdeposition conditions
Kabashin,A.V. ; Charbonneau-Lefort,M. ; Meunier,M. ; Leonelli,R.
Pub. info.: Laser applications in microelectronic and optoelectronic manufacturing V : 24-26 January 2000, San Jose, USA.  pp.192-199,  2000.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3933
3.

Conference Proceedings
Conference Proceedings
3. Molecular-dynamics simulations of picosecond pulsed laser ablation and desorption of silicon
Lorazo,P. ; Lewis,L.J. ; Meunier,M.
Pub. info.: Laser plasma generation and diagnostics : 27 January 2000, San Jose, California.  pp.66-75,  2000.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3935
4.

Conference Proceedings
Conference Proceedings
4. Simulation of picosecond pulsed laser ablation of silicon: the molecular-dynamics thermal-annealing model
Lorazo,P. ; Lewis,L.J. ; Meunier,M.
Pub. info.: Commercial and biomedical applications of ultrashort pulse lasers; laser plasma generation and diagnostics : 23 January, 2001, San Jose, [California] USA.  pp.57-61,  2001.  Bellingham, Washington.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4276
5.

Conference Proceedings
Conference Proceedings
5. Novel laser trimming technique for microelectronics
Meunier,M. ; Gagnon,Y. ; Savaria,Y. ; Lacourse,A. ; Cadotte,M.
Pub. info.: Laser Applications in Microelectronic and Optoelectronic Manufacturing VI.  pp.385-392,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4274