1.

Conference Proceedings
Conference Proceedings
1. PASSIVATION OF Cu PARTICLES ON Si SUBSTRATE BY FOM(HF+O3- UPW) SOLUTION
Morita, H. ; Joo, J.-D. ; Messoussi, R. ; Kawada, K. ; Kim, J.-S. ; Ohmi, T.
Pub. info.: Proceedings of the Fifth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing.  pp.143-150,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-35
2.

Conference Proceedings
Conference Proceedings
2. THE EFFECT OF H2 ANNEALING ON THE Si SURFACE AND ITS USE IN THE STUDY OF ROUGHENING DURING WET CHEMICAL CLEANING
Verhaverbeke, S. ; Futatsuki, T. ; Messoussi, R. ; Ohmi, T.
Pub. info.: Proceedings of the Seventh International Symposium on Silicon Materials Science and Technology.  pp.1170-1181,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-10