1.

Conference Proceedings
Conference Proceedings
1. Numerical assessment of new precursor in MOVPE process
Mukinovic, M. ; Brenner, G. ; Mesic, E. ; Schmid, R.
Pub. info.: EUROCVD-15, fifteenth European Conference on Chemical Vapor Deposition : proceedings of the international symposium.  pp.152-159,  2005.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2005-09
2.

Conference Proceedings
Conference Proceedings
2. Experimental and Numerical Study of the CVD of TiO2 using New Titanium Precursors
Leistner, T ; Frey, L. ; Bauer, A. ; Schmidt, C. ; Lehmbacher, K. ; Haerler, P. ; Herrmann, W. ; Mesic, E. ; Kaufmann, P. ; Kudinski, L. ; Durst, F.
Pub. info.: Fundamental gas-phase and surface chemistry of vapor-phase deposition II and process control, diagnostics, and modeling in semiconductor manufacturing IV : proceedings of the international symposium.  pp.160-167,  2001.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2001-13