Angyal, M. ; Boeck, B. ; Cope, J. ; Dang, C. ; Grudowski, P. ; Islam, R. ; Kolagunta, V. ; Mendonca, J. ; Pettinato, C. ; Selinidis, S. ; Smith, B.
Pub. info.:
Chemical mechanical polishing -- fundamentals and challenges : symposium held April 5-7, 1999, San Francisco, California, U.S.A.. pp.167-172, 2000. Warrendale, PA. Materials Research Society
Hobbs, C. ; Hegde, R. ; Maiti, B. ; Nagabushnam, R. ; La, L. ; Reid, K. ; Dip, A. ; Grove, L. ; Conner, J. ; Kaushik, V. ; Prabhu, L. ; Anderson, A. ; Bagchi, S. ; Mendonca, J. ; Tobin, P.
Pub. info.:
Ultrathin SiO[2] and high-K materials for USLI gate dielectrics : symposium held April 5-8, 1999, in San Francisco, California, U.S.A.. pp.379-, 1999. Warrendale, PA. MRS - Materials Research Society
Venkatraman, R. ; Jain, A. ; Farkas, J. ; Mendonca, J. ; Hamilton, G. ; Capasso, C. ; Denning, D. ; Simpson, C. ; Rogers, B. ; Frisa, L. ; Ong, T. P. ; Herrick, M. ; Kaushik, V. ; Gregory, R. ; Apen, E. ; Angyal, M. ; Filipiak, S. ; Crabtree, P. ; Sparks, T. ; Anderson, S.
Pub. info.:
Advanced interconnects and contact materials and processes for future integrated circuits : symposium held April 13-16, 1998, San Francisco, California, U.S.A.. pp.41-, 1998. Warrendale, Pa.. MRS - Materials Research Society