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33 results

Conference Proceedings

1. Novel Polycrystalline SiC Films Containing Nanoscale Through-Pores by Selective APCVD

Chen, L. ; Fu, X.A. ; Zorman, C.A. ; Mehregany, M.

Pub. info.:	Silicon carbide and related materials - 2005 : proceedings of the International Conference on Silicon Carbide and Related Materials - 2005 : Pittsburgh, Pennsylvania, USA : September 18-23 2005. pp.755-758, 2006. Stafa-Zuerich. Trans Tech Publications
Title of ser.:	Materials science forum
Ser. no.:	527-529

Conference Proceedings

2. Nitrogen-Doping of Polycrystalline 3C-SiC Films Deposited by Low Pressure Chemical Vapor Deposition

Fu, X.A. ; Trevino, J. ; Mehregany, M. ; Zorman, C.A.

Pub. info.:	Silicon carbide and related materials - 2005 : proceedings of the International Conference on Silicon Carbide and Related Materials - 2005 : Pittsburgh, Pennsylvania, USA : September 18-23 2005. pp.311-314, 2006. Stafa-Zuerich. Trans Tech Publications
Title of ser.:	Materials science forum
Ser. no.:	527-529

Conference Proceedings

3. Mechanical Testing of Flexible Silicon Carbide Interconnect Ribbons

Panday, R. ; Fu, X.A. ; Rajgopal, S. ; Lisby, T ; Nikles, S.A. ; Najafi, K. ; Mehregany, M.

Pub. info.:	Silicon carbide and related materials - 2005 : proceedings of the International Conference on Silicon Carbide and Related Materials - 2005 : Pittsburgh, Pennsylvania, USA : September 18-23 2005. pp.1107-1110, 2006. Stafa-Zuerich. Trans Tech Publications
Title of ser.:	Materials science forum
Ser. no.:	527-529

Conference Proceedings

4. Characterization of LOW Stress, Undoped LPCVD Polycrystalline SiC Films for MEMS Applications

Dunning, J. ; Fu, X.A. ; Mehregany, M. ; Zorman, C.A.

Pub. info.:	Silicon carbide and related materials - 2005 : proceedings of the International Conference on Silicon Carbide and Related Materials - 2005 : Pittsburgh, Pennsylvania, USA : September 18-23 2005. pp.1103-1106, 2006. Stafa-Zuerich. Trans Tech Publications
Title of ser.:	Materials science forum
Ser. no.:	527-529

Conference Proceedings

5. MEASUREMENT OF RESIDUAL STRESS-INDUCED BENDING MOMENT OF p+ SILICON FILMS

Chu, W. H. ; Mehregany, M. ; Ning, X. ; Pirouz, P.

Pub. info.:	Thin films : stresses and mechanical properties III : symposium held December 2-5, 1991, Boston, Massachusetts, U.S.A.. pp.169-176, 1992. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	239

Conference Proceedings

6. XRD and XTEM Investigation of Polycrystalline Silicon Carbide on Polycrystalline Silicon

Roy, S. ; Zorman, C. A. ; Wu, C. H. ; Fleischman, A. J. ; Mehregany, M.

Pub. info.:	Materials for mechanical and optical microsystems : symposium held December 4-5, 1996, Boston, Massachusetts,U.S.A.. pp.81-, 1997. Pittsburgh, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	444

Conference Proceedings

7. *Pendeo-epitaxial growth and characterization of GaN and related materials on 6H-SiC(0001) and Si(111) substrates

Davis, R. F. ; Gehrke, T. ; Linthicum, K. J. ; Zheleva, T. S. ; Rajagopal, P. ; Zorman, C. A. ; Mehregany, M.

Pub. info.:	GaN and related alloys - 1999 : symposium held November 28-December 3, 1999, Boston, Massachusetts, U.S.A.. pp.W2.1.1-, 2000. Warrendale, Pa.. MRS-Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	595

Conference Proceedings

8. Deposition and characterization of in situ boron doped polycrystalline silicon films for microelectromechanical systems applications

McMahon, J. J. ; Melzak, J. M. ; Zorman, C. A. ; Chung, J. ; Mehregany, M.

Pub. info.:	Materials science of microelectromechanical systems (MEMS) devices II : symposium held November 29-December 1, 1999, Boston, Massachusetts, U.S.A.. pp.31-, 2000. Warrendale, Pa.. MRS-Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	605

Conference Proceedings

9. Process Routes for Low Defect-Density GaN on Various Substrates Employing Pendeo-Epitaxial Growth Techniques

Linthicum, K. J. ; Gehrke, T. ; Thomson, D. B. ; Tracy, K. M. ; Carlson, E. P. ; Smith, T. P. ; Zheleva, T. S. ; Zorman, C. A. ; Mehregany, M. ; Davis, R. F.

Pub. info.:	GaN and related alloys : symposium held November 30-December 4, 1998, Boston, Massachusetts, U.S.A.. pp.G4.9.1-, 1999. Warrendale, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	537

10.

Conference Proceedings

10. IN SITU MEASUREMENT OF YOUNG'S MODULUS AND RESIDUAL STRESS OF THIN ELECTROLESS NICKEL FILMS FOR MEMS APPLICATIONS

Roy, S. ; Furukawa, S. ; Miyajima, H. ; Mehregany, M.

Pub. info.:	Thin films, stresses and mechanical properties V : symposium held November 28-December 2, 1994, Boston, Massachusetts, U.S.A.. pp.573-, 1995. Pittsburgh, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	356

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Author: Mehregany, M.