1.

Conference Proceedings

Conference Proceedings
Laidler, D. ; Megens, H.J. ; Lalbahadoersing, S. ; van Haren, R.J. ; Bornebroek, F.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XVI.  Part One  pp.397-408,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4689
2.

Conference Proceedings

Conference Proceedings
Warrick, S.P. ; Hinnen, P.C. ; van Haren, R.J. ; Smith, C.J. ; Megens, H.J. ; Fu, C.-C.
Pub. info.: Optical Microlithography XV.  Part Two  pp.971-980,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4691