1.

Conference Proceedings

Conference Proceedings
Patel, K.S. ; Lawson, M.C. ; Varanasi, P.R. ; Medeiros, D.R. ; Wallraff, G.M. ; Brock, P.J. ; DiPietro, R.A. ; Nishimura, Y. ; Chiba, T. ; Slezak, M.
Pub. info.: Advances in Resist Technology and Processing XXI.  pp.94-102,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5376
2.

Conference Proceedings

Conference Proceedings
Hinsberg, W. ; Wallraff, G.M. ; Larson, C.E. ; Davis, B.W. ; Deline, V. ; Raoux, S. ; Miller, D. ; Houle, F.A. ; Hoffnagle, J. ; Sanchez, M.I. ; Rettner, C. ; Sundberg, L.K. ; Medeiros, D.R. ; Dammel, R.R. ; Conley, W.E.
Pub. info.: Advances in Resist Technology and Processing XXI.  pp.21-33,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5376
3.

Conference Proceedings

Conference Proceedings
Huang, W.-S. ; He, W. ; Li, W. ; Moreau, W.M. ; Lang, R. ; Medeiros, D.R. ; Petrillo, K.E. ; Mahorowala, A.P. ; Angelopoulos, M. ; Deverich, C. ; Huang, C. ; Rabidoux, P.A.
Pub. info.: Photomask and Next-Generation Lithography Mask Technology X.  pp.58-66,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5130
4.

Conference Proceedings

Conference Proceedings
Petrillo, K.E. ; Medeiros, D.R. ; Buccohignano, J. ; Angelopoulos, M. ; Goldfarb, D.L. ; Huang, W.-S. ; Moreau, W.M. ; Lang, R. ; Huang, C. ; Deverich, C. ; Cardinali, T.J.
Pub. info.: 22nd Annual BACUS Symposium on Photomask Technology.  Part One  pp.607-618,  2002.  Bellingham, WA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4889
5.

Conference Proceedings

Conference Proceedings
Huang, W.-S. ; Kwong, R.W. ; Moreau, W.M. ; Lang, R. ; Medeiros, D.R. ; Petrillo, K.E. ; Mahorowala, A.P. ; Angelopoulos, M. ; Lin, Q. ; Dai, J. ; Ober, C.K.
Pub. info.: Advances in Resist Technology and Processing XIX.  Part One  pp.432-441,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4690
6.

Conference Proceedings

Conference Proceedings
Medeiros, D.R. ; Petrillo, K.E. ; Breyta, G. ; Huang, W.-S. ; Moreau, W.M.
Pub. info.: Advances in Resist Technology and Processing XIX.  Part One  pp.442-452,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4690
7.

Conference Proceedings

Conference Proceedings
Kwong, R.W. ; Khojasteh, M. ; Lawson, P. ; Hughes, T. ; Varanasi, P.R. ; Brunsvold, B. ; Allen, R.D. ; Brock, P.J. ; Sooriyakumaran, R. ; Truong, H.D. ; Mahorowala, A.P. ; Medeiros, D.R.
Pub. info.: Advances in Resist Technology and Processing XIX.  Part One  pp.403-409,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4690
8.

Conference Proceedings

Conference Proceedings
Burns, S.D. ; Medeiros, D.R. ; Johnson, H.F. ; Wallraff, G.M. ; Hinsberg, W.D. ; Willson, C.G.
Pub. info.: Advances in Resist Technology and Processing XIX.  Part One  pp.321-331,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4690
9.

Conference Proceedings

Conference Proceedings
Wallraff, G.M. ; Larson, C.E. ; Fender, N. ; Davis, B. ; Medeiros, D.R. ; Meute, J. ; Lamanna, W.M. ; Parent, M.J. ; Robeledo, T. ; Young, G.L.
Pub. info.: Advances in Resist Technology and Processing XIX.  Part One  pp.160-168,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4690
10.

Conference Proceedings

Conference Proceedings
Pfeiffer, D. ; Mahorowala, A.P. ; Babich, K. ; Medeiros, D.R. ; Petrillo, K.E. ; Angelopoulos, M. ; Huang, W.-S. ; Halle, S. ; Brodsky, C. ; Allen, S.D. ; Holmes, S.J. ; Kwong, R.W. ; Lang, R. ; Brock, P.J.
Pub. info.: Advances in Resist Technology and Processing XX.  1  pp.136-143,  2003.  Bellingham, CA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5039