1.

Conference Proceedings

Conference Proceedings
Kudo, T. ; Lin, G. ; Lee, D. ; Rahman, D. ; Timko, A. ; Mckenzie, D. ; Anyadiegwu, C. ; Chiu, S. ; Houlihan, F. ; Rentkiewicz, D. ; Dammel, R. R. ; Padmanaban, M. ; Biafore, J.
Pub. info.: Advances in Resist Technology and Processing XXIII.  pp.61532C-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6153
2.

Conference Proceedings

Conference Proceedings
Hong, C.-S. ; Lee, S.-H. ; Kim, W.-K. ; Kudo, T. ; Timko, A. ; Mckenzie, D. ; Anyadiegwu, C. ; Rahman, D.M. ; Lin, G. ; Dammel, R.R. ; Padmanaban, M.
Pub. info.: Advances in Resist Technology and Processing XXI.  pp.1131-1137,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5376