Kwon, Y. ; Jindal, A. ; McMahon, J.J. ; Cale, T.S. ; Gutmann, R.J. ; Lu, J-Q.
Pub. info.:
Thin film materials, processes, and reliability, plasma processing for the 100 nm node and copper interconnects with low-k inter-level dielectric films : proceedings of the international symposium. pp.405-415, 2003. Pennington, N.J.. Electrochemical Society
Lu, J.-Q. ; Jindal, A. ; Kwon, Y. ; McMahon, J.J. ; Lee, K-W. ; Craft, R.P. ; Altemus, B. ; Cheng, D. ; Eisenbraum, E. ; Cale, T.S. ; Gutmann, R.J.
Pub. info.:
Thin film materials, processes, and reliability, plasma processing for the 100 nm node and copper interconnects with low-k inter-level dielectric films : proceedings of the international symposium. pp.381-389, 2003. Pennington, N.J.. Electrochemical Society
Lu, J.-Q. ; Kwon, Y. ; Jindal, A. ; McMahon, J.J. ; Cale, T.S. ; Gutmann, R.J.
Pub. info.:
Semiconductor wafer bonding : science, technology, and applications : proceedings of the international symposia. pp.76-86, 2003. Pennington, NJ. Electrochemical Society
McMahon, J.J. ; Niklaus, F. ; Kumar, R.J. ; Yu, J. ; Lu, J.-Q. ; Gutmann, R.J.
Pub. info.:
Chemical-mechanical planarization - integration technology and realiability : symposium held March 28-31, 2005, San Francisco, California, U.S.A.. pp.63-68, 2005. Warrendale, Pa.. Materials Research Society
Lu, J.-Q. ; Jindal, A. ; Kwon, Y. ; McMahon, J.J. ; Lee, K.-W. ; Kraft, R.P. ; Altemus, B. ; Cheng, D. ; Eisenbraun, E. ; Cale, T.S. ; Gutmann, R.J
Pub. info.:
Semiconductor wafer bonding : science, technology, and applications : proceedings of the international symposia. pp.87-95, 2003. Pennington, NJ. Electrochemical Society
Niklaus, F. ; Kumar, R.J. ; McMahon, J.J. ; Yu, J. ; Matthias, T. ; Wimplinger, M. ; Lindner, P. ; Lu, J.-Q. ; Cale, T.S. ; Gutmann, R.J.
Pub. info.:
Materials, technology and reliability of advanced interconnects - 2005 : symposium held March 28-April 1, 2005, San Francisco, California, U.S.A.. pp.393-398, 2005. Warrendale, Pa.. Materials Research Society
McMahon, J.J. ; Kwon, Y. ; Lu, J.-Q. ; Cale, T.S. ; Gutmann, R.J.
Pub. info.:
Thin films : stresses and mechanical properties X : symposium held December 1-5, 2003, Boston, Massachusetts, U.S.A.. pp.99-104, 2002. Warrendale, Pa.. Materials Research Society
Kwon, Y. ; Yu, J. ; McMahon, J.J. ; Lu, J.-Q. ; Cale, T.S. ; Gutmann, R.J.
Pub. info.:
Materials, technology and reliability for advanced interconnects and low-k dielectrics - 2004 : symposium held April 13-15, 2004, San Francisco, California, U.S.A.. pp.321-326, 2004. Warrendale. Materials Research Society