Lee, Sang Hwui ; Niklaus, Frank ; McMahon, J. Jay ; Yu, Jian ; Kumar, Ravi J. ; Li, Hui-feng ; Gutmann, Ronald J. ; Cale, Timothy S. ; Lu, J-Q.
Pub. info.:
Materials, technology and reliability of low-k dielectrics and copper interconnects : symposium held April 18-21, 2006, San Francisco, California, U.S.A.. pp.433-438, 2006. Warrendale, Pa.. Materials Research Society
Yu, Jian ; Moore, Richard L. ; Lee, Sang Hwui ; McMahon, J. Jay ; Lu, Jian-Qiang ; Gutmann, Ronald J.
Pub. info.:
Materials, technology and reliability of low-k dielectrics and copper interconnects : symposium held April 18-21, 2006, San Francisco, California, U.S.A.. pp.427-432, 2006. Warrendale, Pa.. Materials Research Society