1.

Conference Proceedings
Conference Proceedings
1. New technique for optical lithography at low k-factors
Sewell,H. ; McCullough,A.W. ; Lauria,J.E. ; Andresen,K.W.
Pub. info.: Optical microlithography XII : 17-19 March 1999, Santa Clara, California.  Part1  pp.150-160,  1999.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3679
2.

Conference Proceedings
Conference Proceedings
2. Micrascan III:0.25-ｦﾌm resolution step-and-scan system
Williamson,D.M. ; McClay,J.A. ; Andresen,K.W. ; Gallatin,G.M. ; Himel,M.D. ; Ivaldi,J. ; Mason,C. ; McCullough,A.W. ; Otis,C. ; Shamaly,J.J. ; Tomczyk,C.
Pub. info.: Optical Microlithography IX.  Part2  pp.780-786,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2726