1.

Conference Proceedings

Conference Proceedings
Lee, C.J. ; Sakuraba, M. ; Ishii, M. ; Matsuura, T. ; Murota, J. ; Kawashima, I. ; Yabumoto, N.
Pub. info.: Chemical vapor deposition : proceedings of the Fourteenth International Conference and EUROCVD-11.  pp.1356-1363,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-25
2.

Conference Proceedings

Conference Proceedings
Tsuchiya, T. ; Matsuura, T. ; Murota, J.
Pub. info.: ULSI Process Integration : proceedings of the International Symposium.  pp.205-210,  2001.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2001-2
3.

Conference Proceedings

Conference Proceedings
Matsuura, T. ; Seino, T. ; Murota, J.
Pub. info.: Plasma etching processes for sub-quarter micron devices : proceedings of the international symposium.  pp.220-225,  1999.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 99-30
4.

Conference Proceedings

Conference Proceedings
Seino, T. ; Fukuchi, A. ; Matsuura, T. ; Murota, J.
Pub. info.: ULSI Process Integration : proceedings of the International Symposium.  pp.324-332,  2001.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2001-2
5.

Conference Proceedings

Conference Proceedings
Ishii, M. ; Goto, K. ; Sakuraba, M. ; Matsuura, T. ; Murota, J. ; Koyanagi, M.
Pub. info.: ULSI science and technology, 1997 : proceedings of the Sixth International Symposium on Ultralarge Scale Integration Science and Technology.  pp.441-452,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-3
6.

Conference Proceedings

Conference Proceedings
Honda, Y. ; Matsuura, T. ; Murota, J.
Pub. info.: Proceedings of the twelfth International Symposium on Plasma Processing.  pp.94-100,  1998.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 98-4
7.

Conference Proceedings

Conference Proceedings
Kanetsuna, T. ; Matsuura, T. ; Murota, J.
Pub. info.: Plasma processing XIII : proceedings of the international symposium.  pp.251-256,  2000.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2000-6
8.

Conference Proceedings

Conference Proceedings
Murota, J. ; Sakuraba, M. ; Matsuura, T.
Pub. info.: Proceedings of the Third International Symposium on Defects in Silicon.  pp.189-202,  1999.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 99-1
9.

Conference Proceedings

Conference Proceedings
Jeong, Y. ; Sakuraba, M. ; Matsuura, T. ; Murota, J.
Pub. info.: Semiconductor silicon 2002 : proceedings of the ninth International Symposium on Silicon Materials Science and Technology.  pp.287-296,  2002.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2002-2
10.

Conference Proceedings

Conference Proceedings
Kikuchi, T. ; Yamashiro, T. ; Moriya, A. ; Noda, T. ; Yamamoto, Y. ; Deng, C. ; Sakuraba, M. ; Matsuura, T. ; Murota, J.
Pub. info.: ULSI process integration : proceedings of the first international symposium.  pp.147-156,  1999.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 99-18