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12 results

Conference Proceedings

1. Influence of mask induced polarization effects on a pattern printability

Ishimaru, T. ; Matsuura, S. ; Seki, M. ; Fujii, K. ; Koizumi, R. ; Hakataya, Y. ; Moriya, A.

Pub. info.:	Optical microlithography XVIII : 1-4 March, 2005, San Jose, California, USA. pp.576-586, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5754

Conference Proceedings

2. Preflight performance measurements of a monolithic Ge:Ga array detector for the Far-Infrared Surveyor onboard ASTRO-F

Shirahata, M. ; Matsuura, S. ; Makiuti, S. ; Patrashin, M. A. ; Kaneda, H. ; Nakagawa, T. ; Fujiwara, M. ; Doi, Y. ; Kawada, M. ; Hirao, T. ; Watabe, T. ; Shibai, H.

Pub. info.:	Optical, infrared, and millimeter space telescopes : 21-25 June 2004, Glasgow, Scotland, United Kingdom. pp.369-380, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5487

Conference Proceedings

3. Combustion Control Barium Stannate Sensor for Automobile

Shimabukuro, M. ; Onaga, K. ; Kajiyama, Y. ; Matsuura, S. ; Komatsu, K. ; Takami, A.

Pub. info.:	Proceedings of the Symposium on Chemical Sensors II. pp.428-434, 1993. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	1993-7

Conference Proceedings

4. Current status of 157-nm lithography using a full-field scanner

Ishimaru, T. ; Matsuura, S. ; Seki, M. ; Fujii, K. ; Koizumi, R. ; Hakataya, Y. ; Moriya, A.

Pub. info.:	Optical microlithography XVIII : 1-4 March, 2005, San Jose, California, USA. pp.1260-1268, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5754

Conference Proceedings

5. A New Network of Faint Calibration Stars from the Near Infrared Spectrometer (NIRS) on the IRTS

Freund, M.M. ; Matsuura, M. ; Murakami, H. ; Cohen, M. ; Manabu, N. ; Matsuura, S. ; Matsumoto, T.

Pub. info.:	Proceedings of the First ISO Workshop on Analytical Spectroscopy : Madrid, Spain, 6-8 October 1997. pp.207-212, 1997. Noordwijk, The Netherlands. ESA Publications Division
Title of ser.:	ESA SP
Ser. no.:	419

Conference Proceedings

6. Creation of New Polymers Using Terminally Unsaturated Polyolefins Prepared with FI Catalysts

Kojoh, S. ; Matsuo, S. ; Matsugi, T. ; Ishii, S. ; Matsuura, S. ; Fujita, T. ; Kashiwa, N.

Pub. info.:	Science and technology in catalysis 2002 : proceedings of the Fourth Tokyo Conference on Advanced Catalytic Science and Technology, Tokyo, July 14-19, 2002. pp.519-520, 2003. Amsterdam. Elsevier
Title of ser.:	Studies in surface science and catalysis
Ser. no.:	145

Conference Proceedings

7. Ethylene Polymerization Behavior of Polymethylene-Bridged Bis (Phenoxy-Imine) Zr Complexes

Ishii, S. ; Mitani, M. ; Saito, J. ; Matsuura, S. ; Furuyama, R. ; Fujita, T.

Pub. info.:	Science and technology in catalysis 2002 : proceedings of the Fourth Tokyo Conference on Advanced Catalytic Science and Technology, Tokyo, July 14-19, 2002. pp.49-54, 2003. Amsterdam. Elsevier
Title of ser.:	Studies in surface science and catalysis
Ser. no.:	145

Conference Proceedings

8. Monolithic Ge:Ga two-dimensional array detector for the FIS instrument on ASTRO-F

Matsuura, S. ; Isozaki, Y. ; Shirahata, M. ; Kaneda, H. ; Nakagawa, T, ; Patrashin, M.A. ; Fujiwara, M. ; Hirao, T. ; Kawada, M. ; Shibai, H. ; Watgabe, T.

Pub. info.:	IR Space Telescopes and Instruments. Part Two pp.902-909, 2003. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4850

Conference Proceedings

9. Modified Rayleigh equation: impact of image fluctuation on imaging performance

Matsuura, S. ; Hashimoto, T.

Pub. info.:	Optical Microlithography XV. Part Two pp.1433-1441, 2002. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4691

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Conference Proceedings

10. In-situ aberration monitoring using phase wheel targets

Zavyalova, L.V. ; Smith, B.W. ; Suganaga, T. ; Matsuura, S. ; Itani, T. ; Cashmore, J.S.

Pub. info.:	Optical Microlithography XVII. pp.172-184, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5377

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