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Recent Progress in Low-Dose SIMOX Wafers Fabricated with Lateral-Thermal Oxidation (ITOX) Process (Invited)

Author(s):
Matsumura, A ( (Nippon Steel Corporation) )
Kawamura, K ( (Nippon Steel Corporation) )
Mizutani, T ( (Nippon Steel Corporation) )
Takaysma, S ( (Nippon Steel Corporation) )
Hamaguchi, I ( (Nippon Steel Corporation) )
Nagatake, Y ( (Nippon Steel Corporation) )
1 more
Publication title:
Proceedings of the Ninth International Symposium on Silicon-on-Insulator Technology and Devices
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
99-3
Pub. Year:
1999
Page(from):
79
Page(to):
92
Pages:
14
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566772259 [1566772257]
Language:
English
Call no.:
E23400/99-3
Type:
Conference Proceedings

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