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32 results

Conference Proceedings

1. Rate-Limiting Step of SiO2 Etching Reaction in Fluorocarbon Plasma Investigated by Electron Spin Resonance and X-Ray Photoelectron Spectroscopy

OkigaWa, M. ; Matsui, M. ; Tatsumi, T. ; Sekine, M.

Pub. info.:	Plasma etching processes for sub-quarter micron devices : proceedings of the international symposium. pp.99-104, 1999. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	99-30

Conference Proceedings

2. Evaluation and Comparison of Various Silicon-On-Sapphire (SOS) Materials using the Pseudo-MOSFET Technique

Hefyene, N. ; Cristoloveanu, S. ; Ghibaudo, G. ; Matsui, M. ; Yasujima, A.

Pub. info.:	Silicon-on-Insulator Technology and Devices X : proceedings of the tenth International Symposium. pp.133-138, 2001. Pennington, N.J.. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	2001-3

Conference Proceedings

3. Recent Advances In SOS Materials and Devices

Morishita, T. ; Moriyasu, Y. ; Matsui, M. ; Yasujima, A.

Pub. info.:	Semiconductor technology (ISTC 2001) : proceedings of the 1st International Conference on Semiconductor Technology. pp.117-126, 2001. Pennington, N.J.. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	2001-17

Conference Proceedings

4. CRYSTALLIZATION PROCESS OF Fe73.5Cu1Nb3Si13.5B9

Nakabayashi, H. ; Doi, M. ; Matsui, M. ; Doyama, M.

Pub. info.:	Nanophase and nanocomposite materials : symposium held December 1-3, 1992, Boston, Massachusetts, U.S.A.. pp.227-232, 1993. Pittsburg, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	286

Conference Proceedings

5. MICROWAVE HEATING OF CERAMICS AND ITS APPLICATIN TO JOINING

Fukushima, H. ; Yamanaka, T. ; Matsui, M.

Pub. info.:	Microwave processing of materials : symposium held April 5-8, 1988, Reno, Nevada, U.S.A.. pp.267-272, 1988. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	124

Conference Proceedings

6. Recent Advances in SOS Material and Devices

Moriyasu, Y. ; Morishita, T. ; Matsui, M. ; Yasujima, A.

Pub. info.:	Silicon-on-Insulator Technology and Devices X : proceedings of the tenth International Symposium. pp.19-26, 2001. Pennington, N.J.. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	2001-3

Conference Proceedings

7. IN-PROCESS DIAGNOSTIC SYSTEM FOR SEMICONDUCTOR MATERIALS USING UHV WAFER TRANSFER CHAMBER

Uchida, F. ; Matsui, M. ; Kakibayashi, H. ; Kouguchi, M. ; Mutoh, A. ; Nagano, H.

Pub. info.:	Diagnostic techniques for semiconductor materials processing : Symposium held November 29-December 2, 1993, Boston, Massachusetts, U.S.A.. pp.293-, 1994. Pittsburgh. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	324

Conference Proceedings

8. Magnetotransport in Thin Films of Lan-nxCa1+nxMnnO3n+1 (n = 2,3, and｡？

Asano, H. ; Hayakawa, J. ; Matsui, M.

Pub. info.:	Science and technology of magnetic oxides : symposium held December 1-4, 1997, Boston, Massachusetts, U.S.A.. pp.131-, 1998. Warrendale, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	494

Conference Proceedings

9. STRUCTURAL FLUCTUATIONS IN MICROCLUSTERS

Doyama, M. ; Matsuoka, H. ; Hirokawa, T. ; Uchida, T. ; Matsui, M.

Pub. info.:	Clusters and cluster-assembled materials : symposium held November 26-30, 1990, Boston, Massachusetts, U.S.A.. pp.195-200, 1991. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	206

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Conference Proceedings

10. Inverse TMR effect in Co0.9Fe0.1/SrTiO3/ La0.7Sr0.3MnO3 Tunnel Junctions

Sugiyama, M. ; Asano, H. ; Matsui, M. ; Hayakawa, J. ; Kokado, S. ; Itou, K. ; Sakuma, A. ; Ichimura, M.

Pub. info.:	Spintronics : symposium held November 26-29, 2001, Boston, Massachusetts, U.S.A.. pp.29-34, 2002. Warrendale, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	690

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