1.

Conference Proceedings
Conference Proceedings
1. SOI materials for mainstream CMOS technology
Maszara, W.P. ; Dockerty, R. ; Gondran, C. ; Vasudev, P.K.
Pub. info.: Proceedings of the Eighth International Symposium on Silicon-on-Insulator Technology and Devices.  pp.15-26,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-23
2.

Conference Proceedings
Conference Proceedings
2. TEMPERATURE DEPENDENT AMORPHIZATION OF SILICON DURING SELF IMPLANTATION
Maszara, W.P. ; Rozgonyi, G.A. ; Simpson, L. ; Wortman, J.J.
Pub. info.: Beam-solid interactions and phase transformations : symposium held December 2-4, 1985, Boston, Massachusetts, USA.  pp.381-388,  1985.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 51
3.

Conference Proceedings
Conference Proceedings
3. Integration Challenges for Double-Gate MOSFET Technologies
Maszara, W.P.
Pub. info.: Materials issues in novel si-based technology : symposium held November 26-28, 2001, Boston, Massachusetts, U.S.A..  pp.59-68,  2002.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 686
4.

Conference Proceedings
Conference Proceedings
4. Fully Silicided Metal Gates for High Performance CMOS Technology -
Maszara, W.P.
Pub. info.: Advanced short-time thermal processing for Si-based CMOS devices : proceedings of the international symposium.  pp.341-353,  2004.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2004-01