1.

Conference Proceedings

Conference Proceedings
Mason,M.E. ; Randall,J.N. ; Kim,K.
Pub. info.: Optical microlithography XIII : 1-3 March 2000, Santa Clara, USA.  Part2  pp.1347-1359,  2000.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4000
2.

Conference Proceedings

Conference Proceedings
Mason,M.E. ; Soper,R.A. ; Garza,C.M.
Pub. info.: Optical Microlithography IX.  Part2  pp.847-858,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2726
3.

Conference Proceedings

Conference Proceedings
O'Brien,S.C. ; Mason,M.E.
Pub. info.: Optical Microlithography XIV.  4346  pp.534-543,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4346
4.

Conference Proceedings

Conference Proceedings
Kim,K. ; Mason,M.E. ; Randall,J.N. ; Kim,W.D.
Pub. info.: Optical microlithography XIII : 1-3 March 2000, Santa Clara, USA.  Part1  pp.132-148,  2000.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4000
5.

Conference Proceedings

Conference Proceedings
Mikkelson,A.R. ; Engelstad,R.L. ; Lovell,E.G. ; Bloomstein,T.M. ; Mason,M.E.
Pub. info.: Emerging lithographic technologies III : 15-17 March 1999, Santa Clara, California.  Part2  pp.744-755,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3676
6.

Conference Proceedings

Conference Proceedings
Chatterjee,A. ; Mason,M.E. ; Joyner,K. ; Rogers,D. ; Mercer,D. ; Kuehne,J. ; Esquivel,A.L. ; Mei,P. ; Murtaza,S.S. ; Taylor,K.J. ; Ali,I. ; Nag,S. ; O'Brien,S. ; Ashburn,S.
Pub. info.: Microelectronic Device and Multilevel Interconnection Technology II.  pp.39-47,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2875
7.

Conference Proceedings

Conference Proceedings
Mason,M.E. ; Soper,R.A.
Pub. info.: Optical microlithography XI : 25-27 February 1998, Santa Clara, California.  pp.729-738,  1998.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3334
8.

Conference Proceedings

Conference Proceedings
Mason,M.E. ; Soper,R.A. ; Terry,R.M. ; Mack,C.A.
Pub. info.: Optical Microlithography X.  pp.491-498,  1997.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3051
9.

Conference Proceedings

Conference Proceedings
Palmer,S.R. ; Mason,M.E. ; Randall,J.N. ; Aton,T. ; Kim,K. ; Tritchkov,A.V. ; Burdorf,J. ; Rieger,M.L. ; Stirniman,J.P.
Pub. info.: 20th Annual BACUS Symposium on Photomask Technology.  4186  pp.921-932,  2000.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4186
10.

Conference Proceedings

Conference Proceedings
Siewert,L.K. ; Mikkelson,A.R. ; Engelstad,R.L. ; Lovell,E.G. ; Mason,M.E. ; Mackay,R.S.
Pub. info.: Optical microlithography XIII : 1-3 March 2000, Santa Clara, USA.  Part2  pp.1594-1604,  2000.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4000