1.

Conference Proceedings

Conference Proceedings
Williamson,D.M. ; McClay,J.A. ; Andresen,K.W. ; Gallatin,G.M. ; Himel,M.D. ; Ivaldi,J. ; Mason,C. ; McCullough,A.W. ; Otis,C. ; Shamaly,J.J. ; Tomczyk,C.
Pub. info.: Optical Microlithography IX.  Part2  pp.780-786,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2726
2.

Conference Proceedings

Conference Proceedings
Cote,D.R. ; Andresen,K.W. ; Cronin,D.J. ; Harrold,H. ; Himel,M.D. ; Kane,J. ; Lyons,J. ; Markoya,L. ; Mason,C. ; McCafferty,D.C. ; McCarthy,M.E. ; O'Connor,G. ; Sewell,H. ; Williamson,D.
Pub. info.: Optical Microlithography X.  pp.806-816,  1997.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3051