1.

Conference Proceedings
Conference Proceedings
1. *MULTISTEP, IN-SITU SINGLE WAFER PROCESSING - MATERIALS, DEVICE AND EQUIPMENT ISSUES
Hauser, J. R. ; Masnari, N. A. ; Littlejohn, M. A.
Pub. info.: Rapid thermal annealing/chemical vapor deposition and integrated processing : sympoisium held April 25-28, 1989, San Diego, California, U.S.A..  pp.15-26,  1989.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 146
2.

Conference Proceedings
Conference Proceedings
2. Evaluation of 2.0nm Grown and Deposited Dielectrics in 0.1ｦﾌm PMOSFETs
Srivastava, A. ; Heinisch, H. H. ; Vogel, E. ; Parker, C. ; Osburn, C. M. ; Masnari, N. A. ; Wortman, J. J. ; Hauser, J. R.
Pub. info.: Rapid thermal and integrated processing VII : symposium held April 13-15, 1998, San Francisco, California, U.S.A..  pp.163-,  1998.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 525
3.

Conference Proceedings
Conference Proceedings
3. Evaluation and Comparison of 3.0nm Gate-Stack Dielectrics for Tenth-Micron Technology NMOSFETs
Yee, K. F. ; Osburn, C. M. ; Masnari, N. A. ; Hauser, J. R. ; Parker, C. G. ; Lucovsky, G. ; Henson, W. K. ; Wortman, J. J. ; Kippenberg, T. ; Kuerschner, S.
Pub. info.: Rapid thermal and integrated processing VII : symposium held April 13-15, 1998, San Francisco, California, U.S.A..  pp.157-,  1998.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 525
4.

Conference Proceedings
Conference Proceedings
4. Sub-Half Micron Elevated Source/Drain NMOSFETS by Low Temperature Selective Epitaxial Deposition
Sun, J. ; Bartholomew, R. F. ; Bellur, K. ; O'Neil, P. A. ; Srivastava, A. ; Violette, K. E. ; Ozturk, M. C. ; Osburn, C. M. ; Masnari, N. A.
Pub. info.: Rapid thermal and integrated processing V : symposium held April 8-12, 1996, San Francisco, California, U.S.A..  pp.343-,  1996.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 429