1.

Conference Proceedings

Conference Proceedings
Maslar, J.E. ; Hurst, W.S. ; Kremer, D.M. ; Ehrman, S.H.
Pub. info.: Fundamental gas-phase and surface chemistry of vapor-phase deposition II and process control, diagnostics, and modeling in semiconductor manufacturing IV : proceedings of the international symposium.  pp.168-175,  2001.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2001-13
2.

Conference Proceedings

Conference Proceedings
Nguyen, N.V. ; Maslar, J.E. ; Kim, Jin-Yong ; Han, Jin-Ping ; Park, Jin-Won ; Chandler-Horowitz, D. ; Vogel, E.M.
Pub. info.: High-mobility group-IV materials and devices : symposium held April 13-15, 2004, San Francisco, California, U.S.A..  pp.127-132,  2004.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 809