1.

Conference Proceedings

Conference Proceedings
Arthur,G.G. ; Martin,B.
Pub. info.: Lithography for semiconductor manufacturing II : 30 May-1 June, 2001, Edinburgh, UK.  pp.209-220,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4404
2.

Conference Proceedings

Conference Proceedings
Wildi,F.P. ; Brusa,G. ; Riccardi,A. ; Allen,R.G. ; Lloyd-Hart,M. ; Miller,D. ; Martin,B. ; Biasi,R. ; Gallieni,D.
Pub. info.: Adaptive optics systems and technology II : 30 July-1 August 2001, San Diego, USA.  pp.11-18,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4494
3.

Conference Proceedings

Conference Proceedings
Martin,B. ; Arthur,C.G. ; Wallace,C.
Pub. info.: Metrology, inspection, and process control for microlithography XII : 23-25 February 1998, San Clara, California.  pp.372-383,  1998.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3332
4.

Conference Proceedings

Conference Proceedings
Wallace,C. ; Martin,B. ; Arthur,G.G.
Pub. info.: Metrology, inspection, and process control for microlithography XII : 23-25 February 1998, San Clara, California.  pp.594-602,  1998.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3332
5.

Conference Proceedings

Conference Proceedings
Arthur,G.G. ; Wallace,C. ; Martin,B.
Pub. info.: Metrology, inspection, and process control for microlithography XII : 23-25 February 1998, San Clara, California.  pp.538-549,  1998.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3332
6.

Conference Proceedings

Conference Proceedings
Arthur,G.G. ; Martin,B. ; Mack,C.A.
Pub. info.: Advances in resist technology and processing XIV : 10-12 March 1997, Santa Clara, California.  pp.189-200,  1997.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3049
7.

Conference Proceedings

Conference Proceedings
Martin,B. ; Arthur,G.G.
Pub. info.: Lithography for semiconductor manufacturing : 19-21 May 1999, Edinburgh, Scotland.  pp.197-201,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3741
8.

Conference Proceedings

Conference Proceedings
Arthur,G.C. ; Martin,B.
Pub. info.: Lithography for semiconductor manufacturing : 19-21 May 1999, Edinburgh, Scotland.  pp.202-212,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3741
9.

Conference Proceedings

Conference Proceedings
Wallace,C. ; Martin,B. ; Arthur,G.G.
Pub. info.: Lithography for semiconductor manufacturing : 19-21 May 1999, Edinburgh, Scotland.  pp.213-221,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3741
10.

Conference Proceedings

Conference Proceedings
Wallace,C. ; Martin,B. ; Arthur,G.G.
Pub. info.: Metrology, inspection, and process control for microlithography XIV : 28 February - 2 March 2000, San Clara, California.  pp.656-662,  2000.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3998