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19 results

Conference Proceedings

1. STUDIES OF SiH2Cl2/H2 GAS PHASE CHEMISTRY FOR SELECTIVE THIN FILM GROWTH OF CRYSTALLINE SILICON, c-Si, USING REMOTE PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION

Theil, J.A. ; Lucovsky, G. ; Hattangady, S.V. ; Fountain, G.G. ; Markunas, R.J.

Pub. info.:	Silicon molecular beam epitaxy : symposium held April 29-May 3, 1991, Anaheim, California, U.S.A.. pp.601-612, 1991. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	220

Conference Proceedings

2. PROCESS AND SURFACE CHARACTERIZATION OF HYDROGEN PLASMA CLEANING OF Si(100)

Schneider, T.P. ; Cho, J. ; Vander Weide, J. ; Wells, S.E. ; Lucovsky, G ; Nemanich, R.J. ; Mantini, M.J. ; Rudder, R.A. ; Markunas, R.J.

Pub. info.:	Chemical perspectives of microelectronic materials II : symposium held November 26-28, 1990, Boston, Massachusetts, U.S.A.. pp.333-338, 1991. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	204

Conference Proceedings

3. HYDROGEN-HALOGEN EXCHANGE REACTIONS ON SILICON(100)

Thomas, R.E. ; Rudder, R.A. ; Markunas, R.J.

Pub. info.:	Chemical perspectives of microelectronic materials II : symposium held November 26-28, 1990, Boston, Massachusetts, U.S.A.. pp.327-332, 1991. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	204

Conference Proceedings

4. LOW TEMPERATURE DIAMOND GROWTH: DEVELOPMENT OF WATER-BASED TECHNIQUES FOR DIAMOND CVD

Rudder, R.A. ; Thomas, R.E. ; Hudson, G.C. ; Posthill, J.B. ; Malta, D.P. ; Markunas, R.J.

Pub. info.:	Proceedings of the Third International Symposium on Diamond Materials. pp.372-377, 1993. Pennington, N.J.. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	1993-17

Conference Proceedings

5. HOMOEPITAXIAL DIAMOND LAYERS GROWN WITH DIFFERENT GAS MIXTURES IN A RF PLASMA REACTOR

Posthill, J.B. ; Malta, D.P. ; Rudder, R.A. ; Hudson, G.C. ; Thomas, R.E. ; Markunas, R.J. ; Humphreys, T.P. ; Nemamich, R.J.

Pub. info.:	Proceedings of the Third International Symposium on Diamond Materials. pp.303-309, 1993. Pennington, N.J.. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	1993-17

Conference Proceedings

6. LOW TEMPERATURE IN SITU CLEANING OF Si(100) SURFACES AND TRANSMISSION ELECTRON MICROSCOPY OF SUBSEQUENT GROWTH OF EPITAXIAL GERMANIUM

Rudder, R.A. ; Hattangady, S.V. ; Posthill, J.B. ; Markunas, R.J.

Pub. info.:	Heteroepitaxy on silicon : fundamentals, structure, and devices : symposium held April 5-8, 1988, Reno, Nevada, U.S.A.. pp.529-534, 1988. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	116

Conference Proceedings

7. *CHEMICAL VAPOR DEPOSITION OF DIAMOND FILMS USING WATER: ALCOHOL:ORGANIC-ACID SOLUTIONS

Ruder, R.A. ; Posthill, J.B. ; Hudson, G.C. ; Malta, D.P. ; Thomas, R.E. ; Markunas, R.J. ; Humphreys, T.P. ; Nemanich, R.J.

Pub. info.:	Wide band gap semiconductors : symposium held December 2-6, 1991, Boston, Massachusetts, U.S.A.. pp.23-30, 1992. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	242

Conference Proceedings

8. MICROSTRUCTURAL AND OPTICAL CHARACTERIZATION OF GaN FILMS GROWN BY PECVD ON (0001) SAPPHIRE SUBSTRATES

Humphreys, T.P. ; Sukow, C.A. ; Nemanich, R.J. ; Posthill, J.B. ; Rudder, R.A. ; Hattangady, S.V. ; Markunas, R.J.

Pub. info.:	Diamond, silicon carbide, and related wide bandgap semiconductors : symposium held November 27-December 1, 1989, Boston, Massachusetts, U.S.A.. pp.531-536, 1990. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	162

Conference Proceedings

9. LOW TEMPERATURE CLEANING OF Ge AND GaAs SURFACES USING HYDROGEN DISSOCIATED WITH A REMOTE NOBLE-GAS DISCHARGE

Hattangady, S.V. ; Rudder, R.A. ; Mantini, M.J. ; Fountain, G.G. ; Posthill, J.B. ; Markunas, R.J.

Pub. info.:	Characterization of plasma-enhanced CVD processes : symposium held Novermber 27-28, 1989, Boston, Massachusetts, U.S.A.. pp.221-226, 1990. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	165

10.

Conference Proceedings

10. *DEVELOPMENT OF REMOTE PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION PROCESSES THROUGH THE USE IN VACUO ELECTRON DIFFRACTION AND ELECTRON SPECTROCOPY

Rudder, R.A. ; Fountain, G.G. ; Hattangady, S.V. ; Posthill, J.B. ; Markunas, R.J.

Pub. info.:	Characterization of plasma-enhanced CVD processes : symposium held Novermber 27-28, 1989, Boston, Massachusetts, U.S.A.. pp.151-160, 1990. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	165

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