1.

Conference Proceedings
Conference Proceedings
1. IN SITU CONTAMINATION CONTROL INVESTIGATION OF SILICON NITRIDE LOW PRESSURE CHEMICAL VAPOR DEPOSITION PROCESS IN VERTICAL THERMAL REACTORS
Moinpour, Mansour ; Bohannan, K. ; Shenasa, M. ; Sharif, A. ; Guzzo, G. ; Brestovansky, D.F. ; Markle, R.J. ; Wilkes, R.
Pub. info.: Chemical surface preparation, passivation, and cleaning for semiconductor growth and processing : symposium held April 27-29, 1992, San Francisco, California, U.S.A..  pp.179-186,  1992.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 259
2.

Conference Proceedings
Conference Proceedings
2. Cost and revenue impact of advanced process control (APC) with an emphasis on run-to-run control (R2R)
Stanley, T.D. ; Markle, R.J. ; Eck, B.V. ; Cusson, B.K. ; Purdy, M.A. ; Stanley, K.J.
Pub. info.: Advanced process control and automation : 27 February, 2003, Santa Clara, California, USA.  pp.130-138,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5044
3.

Conference Proceedings
Conference Proceedings
3. Wafer-level fault detection and classification on a photo track in a high volume fab
Jackson, T.L. ; Markle, R.J. ; Miller, C.W. ; Stewart, E.C. ; Crowell, R.A.
Pub. info.: Design, process integration, and characterization for microelectronics : 6-7 March 2002, Santa Clara, USA.  pp.128-135,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4692