1.

Conference Proceedings
Conference Proceedings
1. Rapid Thermal Process Requirements for the Annealling of Ultrashallow Junctions
Downey, Daniel F. ; Daryanani, Sonu L. ; Meloni, Marylou ; Brown, Kristen M. ; Felch, Susan B. ; Lee, Brian S. ; Marcus, Steven D. ; Gelpey, Jeff
Pub. info.: Rapid thermal and integrated processing VI : symposium held April 1-4, 1997, San Francisco, California, U.S.A..  pp.299-,  1997.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 470
2.

Conference Proceedings
Conference Proceedings
2. The Effects of Small Concentrations of Oxygen in RTP Annealing of Low Energy Boron, BF2 and Arsenic Ion Implants
Downey, Daniel F. ; Chow, Judy W. ; Lerch, Wilfried ; Niess, Juergen ; Marcus, Steven D.
Pub. info.: Rapid thermal and integrated processing VII : symposium held April 13-15, 1998, San Francisco, California, U.S.A..  pp.263-,  1998.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 525
3.

Conference Proceedings
Conference Proceedings
3. TiSi2 Characterization of CVD-Titanium and RTP on a Cluster Platform-An Initial Investigation
Marcus, Steven D. ; Deutschmann, Lutz
Pub. info.: Rapid thermal and integrated processing IV : symposium held April 17-20, 1995, San Francisco, California, U.S.A..  pp.437-,  1995.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 387