Smart structures and materials 1998 : smart electronics and MEMS : 2-4 March 1998, San Diego, California. pp.93-101, 1998. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
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Micromachining and microfabrication process technology II : 14-15 October, 1996, Austin, Texas. pp.94-102, 1996. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
In-Line Methods and Monitors for Process and Yield Improvement. pp.88-95, 1999. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering