1.

Conference Proceedings
Conference Proceedings
1. Stress and curvature in MEMS mirrors
Gass, F. R. ; Dagel, D. J. ; Adams, D.P. ; Grossetete, G.D. ; Blum Spahn, O. ; Kemme, S.A. ; Mani, S.S. ; Malloy, K.J.
Pub. info.: MOEMS and Miniaturized Systems III.  pp.87-93,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4983
2.

Conference Proceedings
Conference Proceedings
2. Sensitivity of piezoresistive readout device for microfabricated acoustic spectrum analyzer
Stalford, H.L. ; Apblett, C.A. ; Mani, S.S. ; Schubert, W.K. ; Jenkins, M.W.
Pub. info.: MEMS/MOEMS Components and Their Applications.  pp.36-43,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5344
3.

Conference Proceedings
Conference Proceedings
3. Fabrication and characterization of polymer microfluidic devices for bio-agent detection
Morales, A.M. ; Brazzle, J.D. ; Crocker, R.W. ; Domeier, L.A. ; Goods, E.B. ; Hachman, J.T. ; Harnett, C.K. ; Hunter, M.C. ; Mani, S.S. ; Mosier, B.P. ; Simmons, B.A.
Pub. info.: Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS IV.  pp.89-94,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5716