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Conference Proceedings

1. The Smart-Cut Process: Status and Developments

Aspar, B. ; Lagahe, C. ; Moriceau, H. ; Jalaguier, E. ; Mas, A. ; Rayssac, O. ; Biasse, Soubie; B. ; Bruel, M. ; Auberton-Hevre, A.J. ; Barge, T. ; Letertre, F. ; Maleville, C.

Pub. info.:	Semiconductor wafer bonding : science, technology, and applications : proceedings of the international symposia. pp.48-59, 1999. Pennington, N.J.. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	99-35

Conference Proceedings

2. Unibond SOI wafers achieved by Smart-Cut process

Bruel, M. ; Aspar, B. ; Maleville, C. ; Moriceau, H. ; Auberton-Herve, A.J. ; Barge, T.

Pub. info.:	Proceedings of the Eighth International Symposium on Silicon-on-Insulator Technology and Devices. pp.3-14, 1997. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	97-23

Conference Proceedings

3. Unibond SOI Wafers Achieved by Smart-Cut Process

Bruel, M. ; Aspar, B. ; Maleville, C. ; Moriceau, H. ; Auberton-Herve, A.J. ; Barge, T.

Pub. info.:	Proceedings of the Fourth International Symposium on Semiconductor Wafer Bonding : science, technology, and applications. pp.13-24, 1997. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	97-36

Conference Proceedings

4. Detailed Characterization of Wafer Bonding Mechanisms

Maleville, C. ; Rayssac, O. ; Moriceau, H. ; Blasse, B. ; Baroux, L. ; Aspar, B. ; Bruel, M.

Pub. info.:	Proceedings of the Fourth International Symposium on Semiconductor Wafer Bonding : science, technology, and applications. pp.46-55, 1997. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	97-36

Conference Proceedings

5. Some Manufacturing Techniques for Thin Film SOI*

Wittkower, A. ; Maleville, C. ; Barge, T. ; Auberton-Herve, A.

Pub. info.:	ULSI Process Integration : proceedings of the International Symposium. pp.495-505, 2001. Pennington, N.J.. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	2001-2

Conference Proceedings

6. Smart-Cut Technology: An Industrial Application of Ion-Implantation-Induced Cavities

Aspar, B. ; Lagahe, C. ; Moriceau, H. ; Soubie, A. ; Bruel, M. ; Auberton-Herve, A. J. ; Barge, T. ; Maleville, C.

Pub. info.:	Defect and impurity engineered semiconductors, II : symposium held April 13-17, 1998, San Francisco, California, U.S.A.. pp.381-, 1998. Warrendale, Pa. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	510

Conference Proceedings

7. UV scanning enabling advanced SOI defectivity monitoring

Maleville, C. ; Moulin, C. ; Delprat, D. ; McMillan, W. ; Payne, J. ; Birdwell K. ; Moirin R.

Pub. info.:	Silicon-on-insulator technology and devices XII : proceedings of the international symposium. pp.357-362, 2005. Pennington, N.J.. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	2005-03

Conference Proceedings

8. Ultrathin SOI wafer fabrication and metrology

Maleville, C.

Pub. info.:	Silicon-on-insulator technology and devices XI : proceedings of the international symposium. pp.33-44, 2003. Pennington, N.J.. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	2003-5

Conference Proceedings

9. Overview on Some Recent Advances in Wafer Bonding Technologies

Moriceau, H. ; Fournel, F. ; Rayssac, O. ; Cartier, A.M. ; Morales, C. ; Pocas, S. ; Zussy, M. ; Jalaguier, E. ; Biasse, B. ; Bataillou, B. ; Papon, A.M. ; Lagahe, C. ; Aspar, B. ; Maleville, C. ; Leterte, F. ; Ghyselen, B. ; Barge, T.

Pub. info.:	Semiconductor wafer bonding : science, technology, and applications : proceedings of the international symposia. pp.1-16, 2001. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	2001-27

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Conference Proceedings

10. Smart-cut: A Generic Layer Transfer Solution for High Volume SOT Production*

Maleville, C.

Pub. info.:	High purity silicon VII : proceedings of the international symposium. pp.357-368, 2002. Pennington, N.J.. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	2002-20

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Author: Maleville, C.