1.

Conference Proceedings

Conference Proceedings
Ando,S. ; Endo,S. ; Makita,Y. ; Tsukamoto,T.
Pub. info.: Laser processing of materials and industrial applications II : 16-19 September 1998, Beijing, China.  pp.156-168,  1998.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3550
2.

Conference Proceedings

Conference Proceedings
Kakemoto,H. ; Makita,Y. ; Sakuragi,S. ; Show,Y. ; Izumi,T. ; Sakata,I. ; Obara,A. ; Kobayashi,N. ; Ando,S. ; Tsukamoto,T.
Pub. info.: Laser processing of materials and industrial applications II : 16-19 September 1998, Beijing, China.  pp.129-140,  1998.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3550
3.

Conference Proceedings

Conference Proceedings
Kakemoto,H. ; Makita,Y. ; Katsumata,H. ; Iida,T. ; Stauter,C. ; Obara,A. ; Shibata,H. ; Tsai,Y. ; Sakuragi,S. ; Kobayashi,N. ; Hasegawa,M. ; Uekusa,S. ; Tsukamoto,T.
Pub. info.: Laser Processing of Materials and Industrial Applications.  pp.32-43,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2888
4.

Conference Proceedings

Conference Proceedings
Yoshida,T. ; Yamada,Y. ; Takeyama,S. ; Orii,T. ; Umezu,I. ; Makita,Y.
Pub. info.: Laser Processing of Materials and Industrial Applications.  pp.6-13,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2888
5.

Conference Proceedings

Conference Proceedings
Makita,Y.
Pub. info.: Optical Characterization Techniques for High-Performance Microelectronic Device Manufacturing III.  pp.87-98,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2877