1.

Conference Proceedings
Conference Proceedings
1. Enhancing yield and productivity with process control applications for contact and via module
Majoni, S. ; Englard, I.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XVII.  1  pp.255-263,  2003.  Bellingham, WA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5038
2.

Conference Proceedings
Conference Proceedings
2. A 90-nm design-rule patterning application using alt-PSM with KrF lithography for volume manufacturing at k1=0.27
Majoni, S. ; Driessen, F.A. ; Kasprowicz, B.S. ; Harris, P.D.
Pub. info.: Optical Microlithography XVII.  pp.1342-1349,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5377