Dietsch, R. ; Holz, Th. ; Mai, H. ; Panzner, M. ; Vollmar, S.
Pub. info.:
Structure and properties of multilayered thin films : symposium held April 17-19, 1995, San Francisco, California, U.S.A.. pp.83-, 1995. Pittsburgh, Pa.. MRS - Materials Research Society
EPDIC 6 : proceedings of the sixth European Powder Diffraction Conference, held August 22-25, 1998 in Budapest, Hungary. pp.179-183, 2000. Zuerich-Uetikon, Switzerland. Trans Tech Publications
Dietsch, R. ; Holz, T. ; Mai, H. ; Hopfe, S. ; Scholz, R. ; Wehner, B. ; Wendrock, H.
Pub. info.:
Structure and properties of multilayered thin films : symposium held April 17-19, 1995, San Francisco, California, U.S.A.. pp.345-, 1995. Pittsburgh, Pa.. MRS - Materials Research Society
Dietsch, R. ; Holz, Th. ; Krawietz, R. ; Mai, H. ; Schoneich, B. ; Scholz, R. ; Vollmar, S. ; Wehner, B.
Pub. info.:
Structure and properties of multilayered thin films : symposium held April 17-19, 1995, San Francisco, California, U.S.A.. pp.351-, 1995. Pittsburgh, Pa.. MRS - Materials Research Society
X-ray mirrors, crystals, and multilayers II : 10-11 July 2002, Seattle, Washington, USA. pp.185-195, 2002. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Loyen, L. ; Boettger, T. ; Braun, S. ; Mai, H. ; Leson, A. ; Scholze, F. ; Tuemmler, J. ; Ulm, G. ; Legall, H. ; Nickles, P.V. ; Sandner, W. ; Stiel, H. ; Rempel, C.E. ; Schulze, M. ; Brutscher, J. ; Macco, F. ; Muellender, S.
Pub. info.:
Metrology, Inspection, and Process Control for Microlithography XVII. 1 pp.12-21, 2003. Bellingham, WA. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering